| Research on Pressure Sensor of Circular Monocrystalline Silicon Chassis | |
| Zhu,Ziyi1,2; Zhang,Shougang1; Ruan,Jun1 | |
| 2024-07-01 | |
| 发表期刊 | Journal of Physics: Conference Series
 |
| ISSN | 1742-6588 |
| 卷号 | 2800期号:1 |
| 摘要 | Abstract Traditional sensors, such as pressure, piezoelectric or piezoresistive, mostly use square silicon-based materials as chassis and use Wheatstone bridge circuits to measure pressure and resistance values. Nowadays, reducing the size of sensors is also a problem to be solved in the increasingly wide range of sensor applications. In this paper, a circular monocrystalline silicon base pressure sensor is designed and its performance is studied. We applied COMSOL software to model the circular chassis base pressure sensor, tested the deformation of the circular chassis base pressure sensor under different access volttimes and pressures, analyzed its sensitivity and other performance, and compared the above performance with the rectangular monocrystalline silicon chassis base pressure sensor. The experimental results show that the circular monocrystalline silicon chassis pressure sensor has excellent electrostriction performance, and the variation of the potential and potential difference in the measuring area is more obvious than that of the rectangular monocrystalline silicon chassis pressure sensor. This paper provides a reference for sensor makers. |
| 关键词 | Precision instrumentation Circular pressure sensor Rectangular pressure sensor COMSOL simulation Performance analysis |
| DOI | 10.1088/1742-6596/2800/1/012009 |
| 语种 | 英语 |
| WOS记录号 | IOP:JPCS_2800_1_012009 |
| 出版者 | IOP Publishing |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://210.72.145.45/handle/361003/14606 |
| 专题 | 量子频标研究室 |
| 通讯作者 | Zhu,Ziyi; Zhang,Shougang; Ruan,Jun |
| 作者单位 | 1.National Time Service Center, Chinese Academy of Sciences, Xi’an, China 2.University of Chinese Academy of Science, Beijing, China |
| 推荐引用方式 GB/T 7714 | Zhu,Ziyi,Zhang,Shougang,Ruan,Jun. Research on Pressure Sensor of Circular Monocrystalline Silicon Chassis[J]. Journal of Physics: Conference Series,2024,2800(1). |
| APA | Zhu,Ziyi,Zhang,Shougang,&Ruan,Jun.(2024).Research on Pressure Sensor of Circular Monocrystalline Silicon Chassis.Journal of Physics: Conference Series,2800(1). |
| MLA | Zhu,Ziyi,et al."Research on Pressure Sensor of Circular Monocrystalline Silicon Chassis".Journal of Physics: Conference Series 2800.1(2024). |
| 条目包含的文件 | 条目无相关文件。 | |||||
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